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![]() | Document Date: 2015-03-16 11:29:22Open Document File Size: 1,49 MBShare Result on FacebookCompanyVan Leeuwenhoek Laboratory / /CurrencyEUR / / /FacilityKN Kavli Nanolab Delft Delft University of Technology Lorentzweg / Van Leeuwenhoek Laboratory / Kavli Institute of Nanoscience Delft / TU Delft Facility / /IndustryTermnano-inspection tools / thermal processing / microfabrication technology / /OrganizationKN Kavli Nanolab Delft Delft University of Technology Lorentzweg / Kavli Institute of Nanoscience Delft / /PersonNano / Frank Dirne / /TechnologyRapid thermal processing / microfabrication technology / lithography / Resist technology / /URLwww.qn.tudelft.nl/kn / /SocialTag |