Back to Results
First PageMeta Content
Technology / Science / Delft University of Technology / Kavli Institute of Nanoscience / Microfabrication / Etching / Electron microscope / Resist / Scanning probe microscopy / Semiconductor device fabrication / Materials science / Microtechnology


Document Date: 2015-03-16 11:29:22


Open Document

File Size: 1,49 MB

Share Result on Facebook

Company

Van Leeuwenhoek Laboratory / /

Currency

EUR / /

/

Facility

KN Kavli Nanolab Delft Delft University of Technology Lorentzweg / Van Leeuwenhoek Laboratory / Kavli Institute of Nanoscience Delft / TU Delft Facility / /

IndustryTerm

nano-inspection tools / thermal processing / microfabrication technology / /

Organization

KN Kavli Nanolab Delft Delft University of Technology Lorentzweg / Kavli Institute of Nanoscience Delft / /

Person

Nano / Frank Dirne / /

Technology

Rapid thermal processing / microfabrication technology / lithography / Resist technology / /

URL

www.qn.tudelft.nl/kn / /

SocialTag