Revision 1.0 Electron Beam Writing with NPGS SOP This is a shortened version that focuses mainly on routine operation. For more detailed instructions, please refer to the user manual “XL-30” and “Nanometer Pattern - Scanning electron microscope - Document - PDFSEARCH.IO

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	Revision 1.0 Electron Beam Writing with NPGS SOP This is a shortened version that focuses mainly on routine operation. For more detailed instructions, please refer to the user manual “XL-30” and “Nanometer Pattern Add to Reading List Document Date: 2015-05-06 04:34:45 Open Document File Size: 756,27 KB Share Result on Facebook Company 8N01 / / IndustryTerm subsequent processing / Software user interface / imaging / beam writing 100nm metal line / metal evaporation / / Person Tang / / Technology lithography / lithography system / CAD / / URL http / SocialTag Physics Electron beam lithography Scanning electron microscope Electron microscope Microscopy Electron Focused ion beam Transmission electron microscopy Scientific method Electron microscopy

Revision 1.0 Electron Beam Writing with NPGS SOP This is a shortened version that focuses mainly on routine operation. For more detailed instructions, please refer to the user manual “XL-30” and “Nanometer PatternAdd to Reading List