tunnel juncJVST A - Vacuum / H. Fang Columbia University / S. R. Manalis Massachusetts Institute of Technology / C. F. Quate Stanford University / /
IndustryTerm
present device / metal / metal film / chemical vapor deposition / e-beam / chemical reactor / /
NaturalFeature
SET island / /
Organization
Columbia University / American Vacuum Society / Stanford University / MITI / Massachusetts Institute of Technology / U.S. Securities and Exchange Commission / /
Person
K. Yano / T. Hashimoto / K. Seki / F. Murai / T. Ishii / T. Kobayashi / /