Radisson University Hotel / The Cornell Nanoscale Facility / Nanofabrication Facility / UW Nanotech User facility / Penn State Installs Surface Particle Inspection Analyzer The Penn State Nanofabrication Facility / Cornell University / Michigan The Michigan Nanofabrication Facility / Biointerfaces The University of Minnesota Characterization Facility / Pettit Building / The University of Washington Nanotech User Facility / University of Minnesota / Twin Cities East Bank campus / New Cleanroom Facility The Michigan Nanofabrication Facility / Harvard University / /
IndustryTerm
disruptive technology / xenon difluoride gas injection systems / chemical mechanical polishing tool / on-line application / ancillary support systems / nanofabrication technologies / filtered pump systems / energy dispersive spectrometer / characterization tools / e-beam / /
Organization
Harvard University / National Science Foundation / Society of Hispanic Professional Engineers / Cornell / Triangle National Lithography Center / Center for Nanoscale Systems / Cornell University / University of Minnesota Characterization Facility / University of New Mexico / University of Minnesota / University of Washington Nanotech User Facility / DOE Center for Integrated Nanotechnologies / /
Person
Pilar Herrera-Fierro / Greg Haugstad / /
Position
Equipment Highlights Michigan Installs Chemical Mechanical Polisher / general scientific community / /
National Nanotechnology Infrastructure Network Vol