AJA International ATC Orion-5 3 stage confocal RF Magnetron Sputtering System (Quick Start Guide) • Turn on the cooling water, compressed air, N2, and Argon gas • Main power on Vacuum off (in case of vacuum’s ru - Semiconductor International - Document - PDFSEARCH.IO

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Date: 2015-04-28 16:32:41 Thin film deposition Semiconductor device fabrication Coatings Materials science Plasma processing Sputter deposition Sputtering Cavity magnetron Vacuum tube		AJA International ATC Orion-5 3 stage confocal RF Magnetron Sputtering System (Quick Start Guide) • Turn on the cooling water, compressed air, N2, and Argon gas • Main power on Vacuum off (in case of vacuum’s ru Add to Reading List Source URL: jiam.utk.edu Download Document from Source Website File Size: 70,84 KB Share Document on Facebook