Date: 2014-07-24 10:08:07

Manufacturing

Annealing

Sputter deposition

Titanium nitride

Ohmic contact

Fusion power

Thin film

Gallium nitride

Plasma

Chemistry

Semiconductor device fabrication

Materials science

Hindawi Publishing Corporation Advances in Mechanical Engineering Volume 2014, Article ID[removed], 6 pages http://dx.doi.org[removed][removed]Research Article

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