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Thin film deposition / Industrial gases / Semiconductor growth / Semiconductor device fabrication / Molecular beam epitaxy / Gallium arsenide / Liquid nitrogen / High-electron-mobility transistor / Water cooling / Epitaxy / Nitrogen / Metalorganic vapour phase epitaxy


High Mobility HEMT Growth with Water-cooling MBE System T.Takamatsu, S.Takagi and G.Kido National Reserch Institute for Metals 3-13 Sakura, Tsukuba, Ibaraki, Japan High mobility GaAs / AlGaAs HEMT structures wer
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Document Date: 2009-05-08 06:40:08


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