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Date: 2004-09-02 10:39:00

Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks Seokwoo Jeon*, Jang-Ung Park*, Ray Cirelli†, Shu Yang‡§, Carla E. Heitzman*, Paul V. Braun*, Paul J. A. Kenis¶, and

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