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Ceramic materials / Atomic physics / Molecular physics / Spectroscopy / X-ray photoelectron spectroscopy / Silicon dioxide / Oxide / High-k dielectric / Silicide / Chemistry / Matter / Anions


Photon Factory Activity Report 2009 #27 Part BSurface and Interface 18A/2008G186 Effect of oxygen coadsorption on titanium silicide formation on Si(001)
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Document Date: 2010-12-27 22:22:08


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Country

Japan / /

Currency

pence / /

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Facility

University of Tokyo / Institute of Materials Structure Science / /

IndustryTerm

metal-oxide-semiconductor / backbond site / e-beam / large binding energy shift / /

Organization

Research Organization / Institute of Materials Structure Science / University of Tokyo / /

Position

RT / /

Technology

semiconductor / spectroscopy / hybridization / dielectric / x-ray / /

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