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Silicon nitride
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1	Materials for stretchable electronics in bioinspired and biointegrated devices Dae-Hyeong Kim, Nanshu Lu, Yonggang Huang, and John A. Rogers Inorganic semiconductors such as silicon, gallium arsenide, and gallium nitride Add to Reading List Source URL: rogers.matse.illinois.edu - Date: 2012-03-18 07:56:02
2	1760 OPTICS LETTERS / Vol. 38, NoJune 1, 2013 C- and L-band erbium-doped waveguide lasers with wafer-scale silicon nitride cavities Add to Reading List Source URL: www.rle.mit.edu - Date: 2015-01-08 18:03:45
3	Electronic Devices on Various Substrates: Fabrication of Releasable SingleCrystal SiliconMetal Oxide FieldEffect Devices and Their Deterministic Assembly on Foreign Substrates (Adv. Funct. Mater) Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2011-08-11 13:58:07 Materials science Chemistry Microtechnology Electrical engineering Semiconductor devices Semiconductor device fabrication MOSFET Silicon on insulator Etching Wafer Photolithography Gallium nitride
4	Journal of Undergraduate Research 4, Selective Atomic Layer Deposition (SALD) of Titanium Dioxide on Silicon and Copper Patterned Substrates K. Overhage Department of Chemical Engineering, Purdue University, I Add to Reading List Source URL: jur.phy.uic.edu Language: English - Date: 2011-03-09 12:29:52 Semiconductor device fabrication Chemistry Matter Manufacturing Thin film deposition Atomic layer deposition Titanium dioxide Chemical vapor deposition Diffusion barrier Thin film Titanium nitride Crystalline silicon
5	www.afm-journal.de www.MaterialsViews.com Seung-Kyun Kang, Suk-Won Hwang, Huanyu Cheng, Sooyoun Yu, Bong Hoon Kim, Jae-Hwan Kim, Yonggang Huang, and John A. Rogers* Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2014-07-22 13:23:02 Chemistry Matter Manufacturing Ceramic materials Semiconductor device fabrication Thin film deposition Plasma processing Anions Chemical vapor deposition Silicon nitride Silicon dioxide Plasma-enhanced chemical vapor deposition
6	MATEC Web of Conferences 30, DOI: m atec conf 0 5 C Owned by the authors, published by EDP Sciences, 2015 Effect of Silicon Nitride Incorporation on Microstructure and Hardne Add to Reading List Source URL: www.matec-conferences.org Language: English Nitrides Superhard materials Metal plating Chemical elements Native element minerals Plating Silicon nitride Nanocomposite Nickel Titanium nitride Metal matrix composite Silicon
7	MATEC Web of Conferences 39 , ) DOI: m atecconf1 0 C Owned by the authors, published by EDP Sciences, 2016 Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Add to Reading List Source URL: www.matec-conferences.org Language: English Semiconductor device fabrication Thin film deposition Materials science Atomic layer deposition Electrical resistivity and conductivity Plasma Coating Titanium nitride Polycrystalline silicon Chemical vapor deposition
8	John P. Pollinger UCLA Conservation Genetics Resource Center Center for Tropical Research UCLA Institute of the Environment and Sustainability & UCLA Ecology and Evolutionary Biology Department Add to Reading List Source URL: www.environment.ucla.edu Language: English - Date: 2015-03-04 18:23:37 Ceramic materials Superhard materials Nitrides Abrasives Pollinger Silicon nitride Ceramic Boron Silicon carbide
9	Microcontact Printing: Arrays of Silicon Micro/Nanostructures Formed in Suspended Configurations for Deterministic Assembly Using Flat and RollerType Stamps (Small) Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2011-03-01 06:52:52 Microtechnology Semiconductor device fabrication Microcontact printing Polydimethylsiloxane Crystalline silicon Etching Wafer Solar cell Silicon Gallium nitride Photolithography
10	F r a u n h o f e r I n s t i t u t e f o r Mic r o e l e c t r o n ic C i r c u i t s a n d S y s t e m s Programme Inter Carnot Fraunhofer HOTMOS High temperature SOI CMOS technology platform for applications up to 25 Add to Reading List Source URL: www.ims.fraunhofer.de Language: English - Date: 2016-08-18 14:30:09 Digital electronics Logic families Integrated circuits Microtechnology Silicon on insulator CMOS Gallium nitride MOSFET Soitec

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