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Technology / Silicon on insulator / Thermal oxidation / Ion implantation / Wafer / Microelectromechanical systems / Silicon on sapphire / Smart Cut / Epitaxy / Semiconductor device fabrication / Materials science / Microtechnology


JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9
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Document Date: 2010-12-09 11:08:13

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File Size: 1,22 MB

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