Photon Factory Activity Report 2004 - Silicon oxynitride - Document - PDFSEARCH.IO

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	Photon Factory Activity Report 2004 #22 Part BSurface and Interface 3B/2003G296 Si 2p core-level spectra for oxynitride on Si(100) with plasma-excited N2O Add to Reading List Document Date: 2010-01-05 10:31:25 Open Document File Size: 55,23 KB Share Result on Facebook Company RCA / / Currency pence / / / Facility Hirosaki University / / IndustryTerm chemical shifts / overall instrumental energy resolution / hot carrier residence / integrated metal-oxide-semiconductor device / chemical shift / photon energy / / Organization Hirosaki University / Yasuo SAKISAKA Faculty of Science and Technology / / / Position RT / / ProvinceOrState Pennsylvania / / RadioStation KATO / / Technology semiconductor / / SocialTag Nitrides Silicon compounds Oxides Crystals Polycrystalline silicon Silicon oxynitride Silicon Temperature Chemistry Matter

Photon Factory Activity Report 2004 #22 Part BSurface and Interface 3B/2003G296 Si 2p core-level spectra for oxynitride on Si(100) with plasma-excited N2OAdd to Reading List