FractureGate: Fracture Fabrication of Single Crystal Silicon Nanosurfaces Alexander D. Sprunt - Slocum - Document - PDFSEARCH.IO

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$Mechanics / Semiconductor device fabrication / Glass physics / Fracture / Microelectromechanical systems / Bone fracture / Deep reactive-ion etching / Materials science / Physics / Microtechnology$ Date: 2011-12-13 18:50:17 Mechanics Semiconductor device fabrication Glass physics Fracture Microelectromechanical systems Bone fracture Deep reactive-ion etching Materials science Physics Microtechnology		FractureGate: Fracture Fabrication of Single Crystal Silicon Nanosurfaces Alexander D. Sprunt & Alexander H. Slocum MIT Mechanical Engineering – Precision Engineering Research Group Room 3-470, 77 Massachusetts Avenue, Add to Reading List Source URL: cba.mit.edu Download Document from Source Website File Size: 2,31 MB Share Document on Facebook

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