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Date: 2010-12-09 11:08:13Technology Silicon on insulator Thermal oxidation Ion implantation Wafer Microelectromechanical systems Silicon on sapphire Smart Cut Epitaxy Semiconductor device fabrication Materials science Microtechnology | JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9Add to Reading ListSource URL: www.soitec.comDownload Document from Source WebsiteFile Size: 1,22 MBShare Document on Facebook |