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Dimension / Fluid dynamics / Vacuum pump / Ultra-high vacuum / Vacuum / Titanium sublimation pump / Pump / Sorption pump / Getter / Physics / Matter / Ion pump


August 30, 2013 CANON ANELVA Corporation Backward-compatible models for overseas use Newly released P-500 series ion pump/noble pump controllers CANON ANELVA Corporation (CANON ANELVA) has announced the release of the
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Document Date: 2013-08-29 19:26:18

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Company

CANON ANELVA Corporation / /

Event

Product Release / /

IndustryTerm

electron-beam lithography equipment / oil / ionized gas molecules / pump start-up / oil-free ultra-high vacuum / gas ions / ultra-high vacuum systems / energy-saving / ion beam equipment / gas molecules / /

Position

series ion pump/noble pump controller / controller / /

Product

P-500 / /

Technology

sublimation / lithography / /

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