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City Bloomington / Minnetonka / / Company Going Further Semiconductor / Savigent Software Inc. / / / IndustryTerm process tool / particular lithography tool / metrology tool / workflow automation software / real-time communication / metrology equipment / software / manufacturing process step / overlay tool / software capability / virtual server / semiconductor manufacturer / semiconductor maker / manufacturing facilities / lithography tool / software package / / Organization US Federal Reserve / / / Position server and run-to-run controller / photolithography process engineer at the company. with them / station sales@savigent.com www.savigent.com CASE STUDY controller / photolithography process engineer / SECS/GEM host controller / controller / engineer / / Product Sharepoint / / ProvinceOrState Minnesota / / Technology semiconductor / virtual server / Lithography / simulation / photolithography / / URL www.savigent.com / / SocialTag 
CASE STUDY Semiconductor Maker Improves Lithography Overlay Performance through Workflow Automation based Run-to-Run Control A U.S-based semiconductor manufacturer, operating a 200,000