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/ Facility University of Minnesota / Mechanical Engineering Purdue University / Purdue University / Indian Institute of Technology / / IndustryTerm metal-dielectric contact / microelectromechanical systems / / Organization Mechanical Engineering Department / Purdue University / University of Minnesota / Indian Institute of Technology / Kharagpur in India / / Person Jayathi Murthy / Sanjay Mathur / Shankhadeep Das / Alina Alexeenko / / Position Professor / / ProvinceOrState Minnesota / / Technology microelectromechanical systems / MEMS / dielectric / / URL http /
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