Toggle navigation
PDFSEARCH.IO
Document Search Engine - browse more than 18 million documents
Sign up
Sign in
Back to Results
First Page
Meta Content
View Document Preview and Link
Deep Si Etching at the UCSB Nanofabrication Facility Silicon Deep RIE/ICP – Bosch Si- DRIE
Add to Reading List
Document Date: 2013-01-06 22:10:49
Open Document
File Size: 531,81 KB
Share Result on Facebook
City
Fluorine /
/
Company
Oerlikon USA Inc. /
N. /
/
Person
Release Etch /
Shouliang Lai /
/
Position
Cao /
/
Technology
MEMS /
/
SocialTag
Technology
Etching
Deep reactive-ion etching
Microelectromechanical systems
Glass etching
Sulfur hexafluoride
9W
Microtechnology
Materials science
Semiconductor device fabrication