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Date: 2013-06-18 16:32:06Electromagnetism Waves Acoustics Resonator Microelectromechanical systems Surface acoustic wave Resonance Microelectromechanical system oscillator RF MEMS Physics Microtechnology Technology | Microsoft Word - IFCS_MEMS_Tutorial_Piazza.docxAdd to Reading ListSource URL: www.ieee-uffc.orgDownload Document from Source WebsiteFile Size: 40,90 KBShare Document on Facebook |