Journal of Undergraduate Research 7, Atomic Layer Deposition of Zirconium Oxide on Copper Patterned Silicon Substrate Jaya Parulekar Department of Chemical and Biological Engineering, Illinois Institute of

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Date: 2014-07-25 14:43:36		Journal of Undergraduate Research 7, Atomic Layer Deposition of Zirconium Oxide on Copper Patterned Silicon Substrate Jaya Parulekar Department of Chemical and Biological Engineering, Illinois Institute of Add to Reading List Source URL: jur.phy.uic.edu Download Document from Source Website File Size: 392,10 KB Share Document on Facebook