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THE FEATURES OF THE ELECTRON DISTRIBUTION FUNCTION IN THE HOLLOW CATHODE GLOW DISCHARGE IN NITROGEN V.Yu. Bazhenov, A.V. Ryabtsev, I.A. Soloshenko, A.G. Terentyeva, V.V. Tsiolko, A.I. Shchedrin Institute of Physics of NA
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Document Date: 2009-07-14 07:19:58


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City

Kiev / /

Country

Ukraine / /

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Facility

Technology Center / A.I. Shchedrin Institute of Physics / /

IndustryTerm

gas temperature / gas concentration / plasma devices / positive mathematical processing routines / main energy source / above mentioned energy ranges / high-energy electrons / electron energy relaxation increases / energy range / electron energy distribution function / gas mixtures / gas pressure / energy distribution / maximum energy losses / plasma-chemical processes / low-pressure gas discharges / energy / /

Organization

A.I. Shchedrin Institute of Physics of NAS of Ukraine Pr. / /

Person

I.A.Soloshenko / V / A.G. Terentyeva / V / V.V.Tsiolko / V / /

ProvinceOrState

New Brunswick / /

Technology

SIMULATION / /

SocialTag