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Materials science / Chemistry / Microtechnology / Electrical engineering / Semiconductor devices / Semiconductor device fabrication / MOSFET / Silicon on insulator / Etching / Wafer / Photolithography / Gallium nitride
Date: 2011-08-11 13:58:07
Materials science
Chemistry
Microtechnology
Electrical engineering
Semiconductor devices
Semiconductor device fabrication
MOSFET
Silicon on insulator
Etching
Wafer
Photolithography
Gallium nitride

Electronic Devices on Various Substrates: Fabrication of Releasable SingleCrystal SiliconMetal Oxide FieldEffect Devices and Their Deterministic Assembly on Foreign Substrates (Adv. Funct. Mater)

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