| Document Date: 2010-01-05 10:34:17
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City Tokyo / / Country Japan / / Currency pence / / / Facility The University of Tokyo / Photon Factory / / IndustryTerm metal / higher binding energy / metal peaks / chemical states / metal-oxide-semiconductor fieldeffect transistors / / Organization University of Tokyo / Department of Applied 2Chemistry / Semiconductor Technology Academic Research Center / High-Energy Accelerator Organization / / Technology semiconductor / radiation / spectroscopy / 3 Semiconductor Technology / laser / dielectric / /
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Photon Factory Activity Report 2006 #24 Part BChemistry 2C/2005S2-002 Thermal decomposition of LaAlO3/SiO2/Si gate stack structures studied by