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Air pollution / Chemical vapor deposition / Small Business Innovation Research / Tibbetts Award / United States Environmental Protection Agency / Pollution / Scrubber / Semiconductor device fabrication


Solid Scrubber for Semiconductor Industry
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Document Date: 2012-03-02 11:00:47


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File Size: 301,33 KB

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City

New Milford / /

Company

Sub-Atmospheric Gas Delivery Systems / ATMI Inc. / Advanced Technology Materials Inc. / /

Continent

America / /

Country

United States / /

Currency

USD / /

Event

M&A / Product Issues / Earnings Announcement / Name Change / Reorganization / /

IndustryTerm

safety-related products / technology innovation / hazardous chemicals / air pollution control equipment / vent gas scrubbers / toxic chemicals / chemical absorption / electronics industry / electronic devices / chemical vapor deposition / dry scrubber technology / point-of-use emission control equipment / chemical vapor deposition processes / semiconductor chips / chemicals / abatement products / adsorbent technology / /

Organization

Environmental Protection Agency / U.S. Small Business Administration / /

Product

Novapure dry scrubber / Novapure Dry Scrubber System / gases / materials / /

ProvinceOrState

Connecticut / /

Technology

semiconductor / DESCRIPTION OF THE TECHNOLOGY / SIGNIFICANCE OF THE TECHNOLOGY / semiconductor chips / dry scrubber technology / pollution control / CVD / chemical vapor deposition / /

SocialTag