Kaiser Systems / Cymer Inc. / C. Huang Cymer Inc. / I. INTRODUCTION Cymer / Universal Voltronics / /
Country
United States / /
Facility
XLA power system / Thornmint Court / /
IndustryTerm
light source systems / module sheet metal cover / light pulse energy variations / lower output energy / precise energy control / Alternate capacitor bank layouts / The initial energy / energy range / electrical-to-light energy conversion efficiencies / liquid cooling hardware / light source energy / high volume manufacturing / energy calculator circuit / energy storage capacitor / stored energy range / oil / thermal management / light source pulse energy detector / pulsed power systems / prototype hardware / energy / energy recovery / constant energy mode / energy storage range / higher semiconductor wafer processing / stored energy / adjusted energy / elegant solution / manufacturing personnel / pulsed energy / light energy / controller software algorithm / electrical energy / sufficient energy / light source energy dose / light source energy vs. voltage range / power systems / lithographic systems / /
A DECADE OF SOLID STATE PULSED POWER DEVELOPMENT AT CYMER INC. R. Ness, P. Melcher, G. Ferguson, and C. Huang Cymer Inc., 17075 Thornmint Court, San Diego, CA 92127, USA Abstract