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Trimethylaluminium
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ALD System UCLA Nanoelectronic Facility Fiji Thermal and Plasma Atomic Layer Deposition System (ALD)
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Source URL: www.nanolab.ucla.edu
Language: English
- Date: 2013-08-20 14:08:48
Vacuum pump
Turbomolecular pump
Thin film
Trimethylaluminium
Vacuum
Chemistry
Thin film deposition
Atomic layer deposition
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