APPLIED PHYSICS LETTERS 99, Fabrication of large-area ultra-thin single crystal silicon membranes Z. Y. Dang,1 M. Motapothula,1 Y. S. Ow,1 T. Venkatesan,2 M. B. H. Breese,1,3,a) M. A. Rana,4 and A. Osman5

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Date: 2013-02-01 05:11:29		APPLIED PHYSICS LETTERS 99, Fabrication of large-area ultra-thin single crystal silicon membranes Z. Y. Dang,1 M. Motapothula,1 Y. S. Ow,1 T. Venkatesan,2 M. B. H. Breese,1,3,a) M. A. Rana,4 and A. Osman5 Add to Reading List Source URL: www.ciba.nus.edu.sg Download Document from Source Website File Size: 816,35 KB Share Document on Facebook