University of Helsinki / University of Oulu / University of Turku / Helsinki University of Technology / Chemistry University of Helsinki P.O. Box / / /
IndustryTerm
metal / chemical thin-film deposition techniques / basic systems / metal alkoxides / microelectronics applications / thin metal / metal precursors / Metal gates / chemical vapor deposition / metal centers / mass transportation / metal nitride barrier layers / micro-electromechanical systems / transition-metal nitrides / conventional metal chloride / metal compounds / chemical methods / /
Movie
H2O / /
NaturalFeature
MOSFET channel / /
Organization
M. Ritala Department / University of Turku / University of Helsinki / University of Oulu / Chemistry University / Helsinki University of Technology / /
Person
M. Leskel / Mikko Ritala Keywords / Mikko Ritala / M. Ritala / /
Position
Professor of inorganic chemistry / Professor / Professor of inorganic materials chemistry / postdoctoral researcher / Associate Professor / /
Technology
semiconductor / semiconductors / polymerization / dielectric / optoelectronics / random access / field-effect transistor / ALE / integrated circuits / CVD / chemical vapor deposition / /
Minireviews M. Leskel and M. Ritala Electronic Materials