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Chemistry / Materials science / Microtechnology / Matter / Polymers / Semiconductor device fabrication / Electrical engineering / SU-8 photoresist / LIGA / Microelectromechanical systems / Photoresist / Resist


SUEX Dry Film Resist – A new Material for High Aspect Ratio Lithography Donald W Johnsona, Jost Goettertb, Varshni Singhb and Dawit Yemaneb a b
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Document Date: 2012-08-02 10:13:02


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File Size: 968,55 KB

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