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Vacuum / Technology / Manufacturing / Physics / Plasma physics / Plasma-enhanced chemical vapor deposition / Thin film / Chemical vapor deposition / Pressure measurement / Thin film deposition / Semiconductor device fabrication / Plasma processing


Chapter 3 Experimental and Analytical techniques Chapter 3 Experimental and Analytical Techniques
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Document Date: 2009-12-03 00:39:18


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File Size: 1,19 MB

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Facility

View port / /

IndustryTerm

stainless steel tubes / stainless steel cylinder / The gas distribution subsystem / stainless steel plate / gas distribution subsystem / process gas / gas inlet feed / gas discharge power supply / gas cylinders / plasma gas discharge / stainless steel / uniform gas distribution / gas room / stainless steel mask / gas lines / stainless steel flat plate / head gas distributor / gas showerhead / gas inlet starts / gas distribution subsystem starts / gas cylinder / Gas feeding line / steel / /

Organization

US Federal Reserve / /

Position

supply and temperature controller / gas shower head / Pressure gauge head / temperature controller / controller / adjustable shower head / /

ProgrammingLanguage

DC / /

Technology

radio frequency / /

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