The University of Tokyo / Hiroshima University / Photon Factory / /
IndustryTerm
higher energy / precise chemical bonding structures / hot carrier resistance / eV chemical shift / plasma-enhanced chemical vapor deposition / energy resolution / radical gas / chemical structure / chemical shift / chemical structures / energy / /
OperatingSystem
Fermi / /
Organization
University of Tokyo / Semiconductor Technology Academic Research Center / High-Energy Accelerator Organization / African Union / Department of Applied Chemistry / Hiroshima University / /
Photon Factory Activity Report 2002 #20 Part BSurface and Interface 2C/2002S2002 Interfacial Chemistry of p-CVD-grown Ultrathin Si Oxynitride Films