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High power pulsed magnetron sputtering: A method to increase deposition rate Priya Raman, Ivan A. Shchelkanov, Jake McLain, and David N Ruzic Citation: Journal of Vacuum Science & Technology A 33, ); doi: 10.
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Document Date: 2015-06-19 13:10:27
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High power pulsed magnetron sputtering: A method to increase deposition rate Priya Raman, Ivan A. Shchelkanov, Jake McLain, and David N Ruzic Citation: Journal of Vacuum Science & Technology A 33, ); doi: 10.