![Thin film deposition / Semiconductor device fabrication / Coatings / Materials science / Plasma processing / Sputter deposition / Sputtering / Cavity magnetron / Vacuum tube Thin film deposition / Semiconductor device fabrication / Coatings / Materials science / Plasma processing / Sputter deposition / Sputtering / Cavity magnetron / Vacuum tube](https://www.pdfsearch.io/img/188ff78982911521bc661dd46b11595a.jpg) Date: 2015-04-28 16:32:41Thin film deposition Semiconductor device fabrication Coatings Materials science Plasma processing Sputter deposition Sputtering Cavity magnetron Vacuum tube | | AJA International ATC Orion-5 3 stage confocal RF Magnetron Sputtering System (Quick Start Guide) • Turn on the cooling water, compressed air, N2, and Argon gas • Main power on Vacuum off (in case of vacuum’s ruAdd to Reading ListSource URL: jiam.utk.eduDownload Document from Source Website File Size: 70,84 KBShare Document on Facebook
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