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Thin film deposition / Semiconductor device fabrication / Chemical vapor deposition / Metalorganic vapour phase epitaxy / Thin film / Vacuum deposition / Epitaxy / X-ray photoelectron spectroscopy / Atomic layer deposition / Chemical vapor deposition of ruthenium
Date: 2010-02-01 15:16:36
Thin film deposition
Semiconductor device fabrication
Chemical vapor deposition
Metalorganic vapour phase epitaxy
Thin film
Vacuum deposition
Epitaxy
X-ray photoelectron spectroscopy
Atomic layer deposition
Chemical vapor deposition of ruthenium

Journal of Undergraduate Research 3, Chemical Vapor Deposition of Nickel Ferrite Using Ni(C5 H5 )2 and Fe(C5 H4 C4 H9 )(C5 H5 ) M. A. Kimbell Department of Electrical Engineering, Rose-Hulman Institute of Techn

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