Tools for Nanoscale Assembly of Novel Catalysts Robert F. Hicks Chemical Engineering Dept., University of California Los Angeles, CA 90095

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Date: 2003-07-23 13:19:47 Chemistry Technology Plasma processing Coatings Vacuum Chemical vapor deposition Thin film Plasma-enhanced chemical vapor deposition Nanolithography Semiconductor device fabrication Thin film deposition Materials science		Tools for Nanoscale Assembly of Novel Catalysts Robert F. Hicks Chemical Engineering Dept., University of California Los Angeles, CA 90095 Add to Reading List Source URL: www.che.caltech.edu Download Document from Source Website File Size: 4,22 MB Share Document on Facebook

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