| Document Date: 2014-07-23 02:45:22
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City Granville / / Company MAXTEK MDC-360C Deposition / 360C Deposition / / Facility Security Control Center / NANOELECTRONICS FABRICATION FACILITY / / IndustryTerm metal / long processing time / e-beam / lift-off metal patterning / distinct sub-systems / metal evaporation process use / metal sources / / Organization Security Control Center / / Person Viewport Telemark / Wilson Pui Keung / Fig / Wing Leong / Peter Yiu Cheong / / / Position MAXTEK MDC-360C Deposition Controller / HB / Deputy Safety Officer / HKUST controller / Vacuum Gauge Controller / Technician / Safety Officer / Controller / MAKTEK controller / EC Technician / / ProgrammingLanguage DC / / ProvinceOrState Ontario / / Technology X-ray / semi-conductors / /
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NANOELECTRONICS FABRICATION FACILITY (NFF), HKUST Standard Operating Manual ___________________________________________________________ AST Peva-450I E-Beam Evaporation System