| Document Date: 2003-07-05 01:46:00
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Company Wiley & Sons / / Facility University of California / / IndustryTerm micro electro mechanical systems / uidic and biomedical devices / wireless communication devices / possible solution / consumer products / semiconductor manufacturing / Image processing / software tools / steel polystyrene / e.g. electronics / manufacturing technology / metal-metal contact / micro device / metal spheres / manufacturing processes / hybrid micro-scale devices / micro systems / / Organization Keller / Berkeley Sensor and Actuator Center / University of California / Berkeley / / Person Ken Y. Goldberg / Cm / Shimon Nof / Ronald S. Fearing / / Position editor / air Harper / dielectric conductor / Al conductor / / ProvinceOrState Pennsylvania / California / / Technology semiconductor / laser / MEMS / VLSI technology / dielectric / MEMS technology / Image processing / integrated circuits / manufacturing technology / /
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Chapter Microassembly Karl F. Bohringer, Ronald S. Fearing, Ken Y. Goldberg, University of California, Berkeley The trend toward miniaturization of mass-produced products such as disk drives, wireless communication devi