![Materials science / Mechanical engineering / Van der Waals force / Nanotechnology / Oxides / Adhesion / Electrostatics / Friction / Adhesive / Chemistry / Physics / Intermolecular forces Materials science / Mechanical engineering / Van der Waals force / Nanotechnology / Oxides / Adhesion / Electrostatics / Friction / Adhesive / Chemistry / Physics / Intermolecular forces](https://www.pdfsearch.io/img/7deddf61d0670f878aba27d2b437b520.jpg)
| Document Date: 2003-07-05 01:46:00 Open Document File Size: 480,67 KBShare Result on Facebook
Company Wiley & Sons / / Facility University of California / / IndustryTerm micro electro mechanical systems / uidic and biomedical devices / wireless communication devices / possible solution / consumer products / semiconductor manufacturing / Image processing / software tools / steel polystyrene / e.g. electronics / manufacturing technology / metal-metal contact / micro device / metal spheres / manufacturing processes / hybrid micro-scale devices / micro systems / / Organization Keller / Berkeley Sensor and Actuator Center / University of California / Berkeley / / Person Ken Y. Goldberg / Cm / Shimon Nof / Ronald S. Fearing / / Position editor / air Harper / dielectric conductor / Al conductor / / ProvinceOrState Pennsylvania / California / / Technology semiconductor / laser / MEMS / VLSI technology / dielectric / MEMS technology / Image processing / integrated circuits / manufacturing technology / /
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