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Date: 2005-07-04 14:46:28 | REVIEW OF SCIENTIFIC INSTRUMENTS 76, 061101 共2005兲 REVIEW ARTICLE Nanoelectromechanical systems K. L. Ekincia兲 Department of Aerospace & Mechanical Engineering, Boston University, Boston, Massachusetts 02215Add to Reading ListSource URL: nano.caltech.eduDownload Document from Source WebsiteFile Size: 671,17 KBShare Document on Facebook |