Measurement and Correlation of Ion Beam Current Density to Moisture Stability of Oxide Film Stacks Fabricated by Cold Cathode Ion Assisted Deposition. Dale E. Morton and Vitaly Fridman, Denton Vacuum, LLC., Moorestown, N

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Date: 2013-04-08 22:29:24		Measurement and Correlation of Ion Beam Current Density to Moisture Stability of Oxide Film Stacks Fabricated by Cold Cathode Ion Assisted Deposition. Dale E. Morton and Vitaly Fridman, Denton Vacuum, LLC., Moorestown, N Add to Reading List Source URL: dentonvacuum.com Download Document from Source Website File Size: 201,21 KB Share Document on Facebook