| Document Date: 2015-06-08 13:40:32 Open Document File Size: 2,78 MBShare Result on Facebook
Company D S Y S T E M S A / / / Facility Fraunhofer Institute / / / IndustryTerm thin-film electronics / particular processing steps / electron devices / extended sputtering tools / device processing / inorganic thin-film electronics / power devices / / Organization Fraunhofer Institute for Integrated Systems / / Person Anton Bauer / Volker Häublein / / / Technology lithography / MEMS / process control / 0.8 µm Si-CMOS technology / /
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