| Document Date: 2015-06-08 13:40:52
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City Erlangen / / Company Integrated Systems / / Country Germany / / / Facility Characterization Fraunhofer Institute / / / IndustryTerm flatness structure measurement tools / chemical contamination / analytical equipment / rf-technology / plasma immersion implantation equipment / measurement systems / energy / / Organization Characterization Fraunhofer Institute for Integrated Systems / / Person Martin Schellenberger Competences / Georg Roeder / / / Technology spectroscopy / simulation / X-ray / Process Control / / URL www.iisb.fraunhofer.de / /
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FRAUNHOFER-INSTITUT FÜR I nte g rierte S y steme un d B aue l ementetechno l o g ie I I S B Research and development portfolio