Back to Results
First PageMeta Content
High-k dielectric / Electromagnetism / Electronics / Electrical engineering / Semiconductor device fabrication / Wafer / Ultraviolet


F R A U N H O F E R I N S T I T U T e for I nte g rate d S y ste m s an d De v i c e T e c hno l o g y I I S B 1
Add to Reading List

Document Date: 2015-06-08 12:47:04


Open Document

File Size: 716,65 KB

Share Result on Facebook

City

Erlangen / /

Country

Germany / /

Currency

VUV / /

/

Facility

Fraunhofer Institute / /

/

IndustryTerm

semiconductor manufacturing / /

Organization

Institute for Integrated Systems / /

Person

Martin Schellenberger / /

/

Technology

semiconductor / Optoelectronics / dielectric / /

URL

www.iisb.fraunhofer.de / /

SocialTag