Hermetic Wafer-Level Packaging development for RF MEMS switch C. Ferrandon1*, F. Greco1, E. Lagoutte1, P. Descours1, G. Enyedy1, M. Pellat1, C. Gillot1, P. Rey1, D. Mercier1, M. Cueff1, X. Baillin1, F. Perruchot1, N. Sil

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Date: 2011-12-19 03:46:29		Hermetic Wafer-Level Packaging development for RF MEMS switch C. Ferrandon1*, F. Greco1, E. Lagoutte1, P. Descours1, G. Enyedy1, M. Pellat1, C. Gillot1, P. Rey1, D. Mercier1, M. Cueff1, X. Baillin1, F. Perruchot1, N. Sil Add to Reading List Source URL: www.leti.fr Download Document from Source Website File Size: 13,04 KB Share Document on Facebook