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Fabrication of Silicon-on-Reflectorfor Si-Based Resonant-Cavity-EnhancedPhotodetectors Cheng Li, Qinqing Yang, Haiyan Ou, Qiming Wang State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chine
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Document Date: 2010-10-29 16:03:25
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Fabrication of Silicon-on-Reflectorfor Si-Based Resonant-Cavity-EnhancedPhotodetectors Cheng Li, Qinqing Yang, Haiyan Ou, Qiming Wang State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chine