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Chemistry / Electromagnetism / Matter / Thin film deposition / Semiconductor device fabrication / Atomic layer deposition / Fuel cells / Oxides / Solid oxide fuel cell / Yttrium / Thin film / Sheet resistance


Journal of Undergraduate Research 7, Tunability and Electrical Properties of Yttria-doped-ceria Films Fabricated via Atomic Layer Deposition Russell Sparks Department of Chemical Engineering, Carnegie Mello
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Document Date: 2014-07-25 14:41:23


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File Size: 1,03 MB

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