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APPLIED PHYSICS LETTERS 95, 103111 共2009兲 Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films R. B. Karabalin,1 M. H. Matheny,1 X. L. Feng,1 E. Defaÿ,2 G. Le Rhun,2 C. Marcoux,2 S. H
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Document Date: 2011-06-02 13:26:46
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APPLIED PHYSICS LETTERS 95, 103111 共2009兲 Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films R. B. Karabalin,1 M. H. Matheny,1 X. L. Feng,1 E. Defaÿ,2 G. Le Rhun,2 C. Marcoux,2 S. H