Objective Our goal is to develop Standard Reference Materials (SRMs) and quantitative, reproducible X-ray reflectometry (XRR) data analysis methods to enable accurate measurement of film thickness, roughness, and density - X-ray reflectivity - Document - PDFSEARCH.IO

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	Objective Our goal is to develop Standard Reference Materials (SRMs) and quantitative, reproducible X-ray reflectometry (XRR) data analysis methods to enable accurate measurement of film thickness, roughness, and density Add to Reading List Document Date: 2012-10-04 11:43:22 Open Document File Size: 192,30 KB Share Result on Facebook City Denver / / Company Engineering Laboratory / NIST / Diebold / ISMI Advanced CD Metrology Advisory Group / International SEMATECH Manufacturing / / Country United States / / Currency USD / / / Event Business Partnership / / Facility XRR laboratory / / IndustryTerm microelectronic devices / smooth deposition processing / measurement tools / manufacturing / Online Proceedings / technology transfers / analysis software / / NaturalFeature Jordan Valley / / Organization Ceramics Division / / Person David L. Gil / James P. Cline Albert Henins David / L. Gil Windover / Donald Windover / / / Product SI / / Technology semiconductor / X-ray / / URL www.nist.gov/ceramics / / SocialTag X-ray reflectivity Science National Institute of Standards and Technology Atomic layer deposition Metrology Thin film Wafer Chemistry Manufacturing Thin film deposition

Objective Our goal is to develop Standard Reference Materials (SRMs) and quantitative, reproducible X-ray reflectometry (XRR) data analysis methods to enable accurate measurement of film thickness, roughness, and densityAdd to Reading List