| Document Date: 2013-11-21 20:21:33
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Company KLA-Tencor Corp. / / Event Product Issues / / Facility National Institute of Information / NbN/MgO/NbN tunnel / / IndustryTerm fabricated receiver device / junction device / metal electrodes / discharge gas / semiconductor devices / close-set metal electrodes / potential solution / / Organization National Institute of Information and Communications Technology Vol.55 No.1 / / Position conductor / super0 conductor / / Product lines / / Technology Alpha / radiation / lithography / X-ray / semiconductor devices / dielectric / /
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7-6 Development of Epitaxial NbN THz Mixers KAWAKAMI Akira, TAKEDA Masanori, and WANG Zhen We have developed fabrication processes for epitaxial NbN/MgO/NbN trilayers. The surface resistance of the epitaxial NbN films wa