| Document Date: 2015-04-02 18:11:20
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Company Vladar A. E. / / Currency USD / / Facility National Institute of Standards and Technology / Michael T. Postek National Institute of Standards and Technology / / IndustryTerm acid piranha solution / low energy case / hydrogen peroxide solution / turbo-molecular and oil-free fore pumps / secondary electron imaging / piranha solution / acidic piranha solution / low-energy oxygen plasma cleaning process / industrial applications / mild gas jet / imaging / wet chemical cleaning / resolution imaging parameters / Low-energy oxygen plasma / energy / / Organization National Institute of Standards and Technology / / Person Christopher J. Raymond / Michael T. Postek / J. Raymond Proc / John A. Allgair / Dual Beam II II / Neal T. Sullivan / / Position 1H HH pm / / ProvinceOrState Maryland / / Technology semiconductor / process control / integrated circuits / / URL http /
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Contamination Specification for Dimensional Metrology SEMs András E. Vladár, K. P. Purushotham and Michael T. Postek National Institute of Standards and Technology (NIST), 100 Bureau Dr. Stop 8212, Gaithersburg, MD 208