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Ion implantation / Materials science / Annealing / Chemical elements / Zinc oxide / Nitrogen / Chemistry / Semiconductor device fabrication / Ceramic materials
Date: 2005-08-29 02:19:59
Ion implantation
Materials science
Annealing
Chemical elements
Zinc oxide
Nitrogen
Chemistry
Semiconductor device fabrication
Ceramic materials

APPLIED PHYSICS LETTERS 87, 091910 共2005兲 Interaction of nitrogen with vacancy defects in N+-implanted ZnO studied using a slow positron beam Z. Q. Chen,a兲 M. Maekawa, and A. Kawasuso Advanced Science Research Cen

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