![Ion implantation / Materials science / Annealing / Chemical elements / Zinc oxide / Nitrogen / Chemistry / Semiconductor device fabrication / Ceramic materials Ion implantation / Materials science / Annealing / Chemical elements / Zinc oxide / Nitrogen / Chemistry / Semiconductor device fabrication / Ceramic materials](https://www.pdfsearch.io/img/f110cbc11430c1de7cfd3aebe489e7fb.jpg) Date: 2005-08-29 02:19:59Ion implantation Materials science Annealing Chemical elements Zinc oxide Nitrogen Chemistry Semiconductor device fabrication Ceramic materials | | APPLIED PHYSICS LETTERS 87, 091910 共2005兲 Interaction of nitrogen with vacancy defects in N+-implanted ZnO studied using a slow positron beam Z. Q. Chen,a兲 M. Maekawa, and A. Kawasuso Advanced Science Research CenAdd to Reading ListSource URL: www.geocities.jpDownload Document from Source Website File Size: 83,37 KBShare Document on Facebook
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